The role of gold clusters in semiconductor microstructure fabrication

Gold Bulletin

Volumn 32, Issue 3, 1999, Pages 80-84

  Shirai, Masataka ^a   Haraguchi, Keichi ^a   Hiruma, Kenji ^a   Katsuyama, Toshio ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33747383713     PISSN: 00171557     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF03216614     Document Type: Article

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