A design study of microscale magnetic components for operation in the MHz frequency range

Journal of Micromechanics and Microengineering

Volumn 16, Issue 9, 2006, Pages 1811-1818

  Flynn, D ^a   Dhariwal, R S ^a   Desmulliez, M P Y ^a  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; ELECTRODEPOSITION; GEOMETRY; MAGNETIC DEVICES; SOLENOIDS; THIN FILMS;

MAGNETIC ALLOYS; MAGNETIC COMPONENTS; MICROINDUCTORS; POWER EFFICIENCY;

MICROELECTROMECHANICAL DEVICES;

EID: 33747321428     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/008     Document Type: Article

References (23)

1. Van Wyk J D and Lee F 1999 Power electronics technology at the dawn of the new millennium-status and future Power Electronics Specialists Conf. vol 1
2. Huljak R J, Thottuvelil V J, Marsh A J and Miller B A 2000 Where are power supplies headed? Applied Power Electronics Conf. and Exposition (APEC 2000) 15th Annual IEEE (6-10 Feb.) vol 1 pp 10-7
3. International Technology Roadmap for Semiconductors 2001 Edition System Drivers (ITRS)
4. Lotfi A W and Wilkowski M A 2001 Issues and advances in high-frequency magnetics for switching power supplies Proc. IEEE (June) vol 89 pp 833-45
5. Ohnuma S, Lee H J, Kobayashi N, Fujimori H and Masumoto T 2001 Co-Zr-O nano-granular thin films with improved high frequency soft magnetic properties IEEE Trans. Magn. 37 2251-4
6. Dezuari O, Gilbert S E, Belloy E and Gijs M A M 2000 High inductance planar transformers Sensors Actuators 81 355-8
7. Park J Y, Lagorce L K and Allen M G 1997 Ferrite-based integrated planar inductors and transformers fabricated at low temperature IEEE Trans. Magn. 33 3322-5
8. Chong H Ahn and Mark G Allen 1998 Micromachined planar inductors on silicon wafers for MEMS applications IEEE Trans. Ind. Electron. 45 886-76
9. Marian K K, Giuseppe S, Gabriele G, Ugo R and Antonio M 1999 High frequency small-signal model of ferrite core inductors IEEE Trans. Magn. 35 4185-9
10. Romankiw L, Croll I and Hatzakis M 1970 Batch fabricated thin film magnetic recording heads IEEE Trans. Magn. 6 597-9
11. Romankiw L and Wardly G 1972 Thin film magnetic transducer head US Patent 3662119
12. Hurley W G, Gath E and Breslin J G 2000 Optimizing the ac resistance of multilayer transformer windings with arbitrary current waveforms IEEE Trans. Power Electron. 15 369-76
13. Brunet M, O'Donnell T, O'Brien J, McCloskey P and O'Mathuna C 2001 Design Study and Fabrication Techniques for High Power Density Micro-Transformers (Piscataway, NJ: IEEE) pp 1189-95
14. Ludwig M, Duffy M, O'Donnell T, McCloskey P and O'Mathuna S C 2003 Design Study for Ultraflat PCB Integrated Inductors for Low Power Conversion Applications (Piscataway, NJ: IEEE)
15. Martincic E, Dufour-Gergam E, Bosseboeuf A, Quemper J-M, Cercelaru S, Nguyen A-M and Ahamada B 2000 Activities of the PFM (Ple Francilien Microsystèmes) on permalloy thin films deposition and magnetic devices Proc. Workshop: Preparation, Properties, and Applications of Thin Ferromagnetic Films (Vienna, June) pp 93-100
16. Matlosz M 1993 Competitive absorption effects in the electrodepostion of iron-nickel alloys J. Electrochem. Soc. 140 2272-9
17. Sasaki K Y and Talbot J B 1995 Electrodepostion of binary iron-group alloys J. Electrochem. Soc. 143 3343-8
18. Dahms H 1964 J. Electroanal. Chem. Interfacial Electrochem. 8 5
19. Dahms A and Croll I M 1965 J. Electrochem. Soc. 112 77
20. Saleh N 1978 IEEE Trans. Compon. Hybrids and Manuf. Technol. 1 118-24
21. http://www.vacuumschmelze.de/dynamic/en/home/products/materialsampparts/ softmagnetic/amorphousampnanocrystalline/vitrovac.php
22. Ueno H, Takagi S, Shimizu T, Miwa S and Hayashi T 1972 Kinzoku Hyomen Gijuttsu 23 316
23. Park J Y and Allen M 1998 Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices J. Micromech. Microeng. 8 307-16