Influence of different deposition conditions of top and bottom electrode on the reliability of Sr0.8Bi2.2Ta2O9 ferroelectric capacitors

Solid-State Electronics

Volumn 50, Issue 7-8, 2006, Pages 1227-1234

  Goux, L ^a   Xu, Z ^a,b   Paraschiv, V ^a   Lisoni, J G ^a   Maes, D ^a   Haspeslagh, L ^a   Groeseneken, G ^a,b   Wouters, D J ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Asymmetry; FeRAM; Integration; Process; Reliability; SBT

Indexed keywords

ELECTRIC POTENTIAL; ELECTRODES; FERROELECTRIC DEVICES; FERROELECTRICITY; HYSTERESIS; RELIABILITY; STRONTIUM COMPOUNDS; THERMAL EFFECTS;

ASYMMETRY; FERAM; PROCESS; SBT;

CAPACITORS;

EID: 33747179838     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.06.010     Document Type: Article

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