Low-power magnetized microdischarge ion source

Applied Physics Letters

Volumn 89, Issue 6, 2006, Pages

  Ito, Tsuyohito ^a   Cappelli, Mark A ^a  

^a Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAM DIVERGENCE; IONIZATION EFFICIENCY; MULTI-ION PROCESSING;

ELECTRIC POTENTIAL; ELECTRON ENERGY LEVELS; ION BEAMS; IONIZATION; MAGNETIZATION;

ION SOURCES;

EID: 33747129720     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2335612     Document Type: Article

References (6)

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