Uhv/Cvd Growth of Si and Si:Ge Alloys: Chemistry, Physics, and Device Applications

Proceedings of the IEEE

Volumn 80, Issue 10, 1992, Pages 1592-1608

  Meyerson, Bernard S ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33746991507     PISSN: 00189219     EISSN: 15582256     Source Type: Journal    
DOI: 10.1109/5.168668     Document Type: Article

References (81)

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