Capacitive discharge excilamps with short duration of radiation pulse

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4274, Issue , 2001, Pages 484-489

  Tarasenko, Victor F ^a   Erofeev, Mikhail V ^a   Lomaev, Mikhail I ^a   Sosnin, Edward A ^a   Shitz, Dmitrii V ^a  

^a INSTITUTE OF HIGH CURRENT ELECTRONICS   (Russian Federation)

Author keywords

Capacitive discharge; Electrodeless sealed off excilamp; Ultraviolet

Indexed keywords

CAPACITANCE; DENSITY OF GASES; LASER APPLICATIONS; MANUFACTURE; MICROELECTRONICS;

CAPACITIVE DISCHARGES; DISCHARGE GEOMETRY; DISCHARGE PLASMA; EXCILAMPS; POWER CHARACTERISTIC; PULSE RADIATION; SHORT PULSE DURATION; ULTRAVIOLET;

RADIOACTIVITY MEASUREMENT;

EID: 33746907713     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.432545     Document Type: Conference Paper

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