Monte Carlo simulation of low-medium energy electrons backscattered from C/A1 double layer thin films

Surface and Interface Analysis

Volumn 38, Issue 8, 2006, Pages 1198-1203

  Dapor, Maurizio ^a,b  

^a UNIVERSITY OF TRENTO   (Italy)

^b ITC IRST   (Italy)

Author keywords

Electron backscattering; Monte Carlo simulation; Thin films

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; ELECTRON BEAMS; MONTE CARLO METHODS; THIN FILMS;

BACKSCATTERING COEFFICIENT; ELECTRON BACKSCATTERING; PRIMARY ENERGY;

ELECTRON TRANSITIONS;

EID: 33746865302     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2370     Document Type: Article

References (21)

1. DaporM. Electron-beam Interactions with Solids. Application of the Monte Carlo Method to Electron Scattering Problems. Springer: Berlin, 2003.
2. Dapor M. J. Appl. Phys. 2004; 95: 718.
3. Dapor M. Proceedings of the Monte Carlo 2005 Conference, Chattanooga, TN, April 17-21, 2005. CD-ROM, American Nuclear Society: LaGrange Park, IL, 2005.
4. Mott NF. Proc. R. Soc. London, Ser. 1929; 124: 425.
5. Lin S-R, Sherman N, Perçus JK. Nucl. Phys. 1963; 45: 492.
6. Bunyan PJ, Shonfelder JL. Proc. Phys. Soc. 1965; 85: 455.
7. Dapor M. J. Appl. Phys. 1996; 79: 8406.
8. Jablonski A, Salvat F, Powell CJ. J. Phys. Chem. Ref. Data 2004; 33: 409.
9. Ashley JC. J. Electron Spectrosc. Relat. Phenom. 1988; 46: 199.
10. Tanuma S, Powell CJ, Perm DR. Surf. Interface Anal. 2005; 37:978.
11. Cox HL Jr, Bonham RA. J. Chem. Phys. 1967; 47: 2599.
12. Furness JB, McCarthy IE. J. Phys. B 1973; 6: 2280.
13. Horiguchi S, Suzuki M, Kobayashi T, Yoshino H, Sakakibara Y. Appl. Phys. Lett. 1981; 39: 512.
14. Messina G, Paoletti A, Santangelo S, Tucciarone A. La Riv. del Nuovo Cimento 1992; 15: 1.
15. Dapor M. Phys. Rev. B 1992; 46: 618.
16. Dapor M. Eur. Phys. J.: Appl. Phys. 2002; 18: 155.
17. Cimino R, Collins IR, Furman MA, Pivi M, Ruggiero F, Rumolo G, Zimmermann F. Phys. Rev. Lett. 2004; 93: 014801.
18. Dapor M, Miotello A. In Proceedings of the Monte Carlo 2000 Conference, Lisbon, October 23-26, 2000, Kling A, Barao F, Nakagawa M, Tavora L, Vaz P (eds). Springer: Berlin, 2000; 43.
19. e Congrès International d'Optique des Rayons X et de Microanalyse. Hermann: Paris, 1967; 153.
20. Hunger HJ, Küchler L. Phys. Status Solidi A 1979; 56: K45.
21. Joy DC, http://pciserver.bio.utk.edu/metrology/htm/download.shtml [2004].