Wear resistant TiMoN coatings deposited by magnetron sputtering

Wear

Volumn 261, Issue 2, 2006, Pages 119-125

  Yang, Q ^a   Zhao, L R ^a   Patnaik, P C ^a   Zeng, X T ^b  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

Author keywords

Dry sliding; Lubricious oxide; Magnetron sputtering; TiMoN coatings; Wear resistance

Indexed keywords

CONCENTRATION (PROCESS); MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; WEAR OF MATERIALS; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

DRY SLIDING; LUBRICIOUS OXIDE; TIMON COATINGS; WEAR RATE;

PROTECTIVE COATINGS;

CONCENTRATION (PROCESS); MAGNETRON SPUTTERING; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; WEAR OF MATERIALS; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 33746806657     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2005.07.008     Document Type: Article

References (23)

1. Musil J., and Hruby H. Thin Solid Films 365 (2000) 104
2. Zeng X.T. J. Vac. Sci. Technol. A 17 (1999) 1991
3. PalDey S., and Deevi S.C. Mater. Sci. Eng. A 342 (2002) 58
4. Jehn H.A., and Rother B. Surf. Coat. Technol. 112 (1999) 103
5. Jindal P.C., Santhanam A.T., Schleinkofer U., and Shuster A.F. Int. J. Refractory Metals Hard Mater. 17 (1999) 163
6. Knotek O., Münz W.-D., and Leyendecker T. J. Vac. Sci. Technol., A 4 (1987) 2173
7. Smith I.J., Gillibrand D., Brooks J.S., Münz W.-D., Harvey S., and Goodwin R. Surf. Coat. Technol. 90 (1997) 164
8. Sanjines R., Wiemer C., Almeida I., and Levy F. Thin Solid Films 290-291 (1996) 334
9. Regent F., and Musil J. Surf. Coat. Technol. 142-144 (2001) 146
10. Abu-Zeid O.A., and Bates R.I. Surf. Coat. Technol. 86-87 (1996) 526
11. Bielawski M. Surf. Coat. Technol. 179 (2004) 10
12. Ürgen M., Eryilmaz O.L., Çakir A.F., Kayali E.S., Nilüfer B., and Işik Y. Surf. Coat. Technol. 94-95 (1997) 501
13. Ahn H.-S., Lyo I.-W., and Lim D.-S. Surf. Coat. Technol. 133-134 (2000) 351
14. Oliver W.C., and Pharr G.M. J. Mater. Res. 7 (1992) 1564
15. Franklin S.E., and Beuger J. Surf. Coat. Technol. 54-55 (1992) 459
16. Mayrhofer P.H., Hovsepian P.Eh., Mitterer C., and Munz W.-D. Surf. Coat. Technol. 177-178 (2004) 341
17. Xu J., and Kato K. Wear 245 (2000) 61
18. Solak N., Ustel F., Urgen M., Aydin S., and Cakir A.F. Surf. Coat. Technol. 174-175 (2003) 713
19. Woydt M., Skopp A., Dörfel I., and Witke K. Tribol. Trans. 42 (1999) 21
20. Wang D., Su D.S., and Schlögl R. Cryst. Res. Technol. 38 (2003) 153
21. Gardos M.N. Tribol. Trans. 21 (1987) 214
22. Strong K.L., Zabinski J.S., and Vreugdenhil A.J. J. Mater. Sci. 36 (2001) 5407
23. Rigney D.A. Tribol. Inter. 30 (1997) 361