Fresnel Lenses: Study and fabrication in silicon technology for medium-IR applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6186, Issue , 2006, Pages

  Fonollosa, Jordi ^a   Rubio, Rafael ^b   Hildenbrand, Jürgen ^c   Moreno, Mauricio ^a   Marco, Santiago ^a   Santander, Joaquín ^b   Fonseca, Luis ^b   Hartwig, Susanne ^c   Wöllenstein, Jürgen ^c  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c FRAUNHOFER INSTITUTE FOR PHYSICAL MEASUREMENT TECHNIQUES IPM   (Germany)

Author keywords

Fresnel Lens; Microoptics; Optical gas sensor; Silicon technology

Indexed keywords

DETECTORS; ETHYLENE; LENSES; MICROOPTICS; OPTICAL SENSORS;

FRESNEL LENS; OPTICAL GAS SENSOR; OPTICAL GAS SYSTEM; PHOTOLITHOGRAPHIC MASKS; SILICON TECHNOLOGY;

OPTICAL INSTRUMENT LENSES;

EID: 33746758923     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662793     Document Type: Conference Paper

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