Fabrication of alumina/polyimide multi-layered material by sputtering and vapor deposition polymerization

Journal of the Ceramic Society of Japan

Volumn 114, Issue 1332, 2006, Pages 713-715

  Naganuma, Tamaki ^a   Kakisawa, Hideki ^a   Dericioglu, Arcan F ^a,b   Kagawa, Yutaka ^a,c  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

^b MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Alumina layer; Multi layered structure; Polyimide; RF magnetron sputtering; Vapor deposition polymerization

Indexed keywords

CRACKS; DELAMINATION; LAMINATES; MAGNETRON SPUTTERING; MULTILAYERS; POLYIMIDES; POLYMERIZATION; SILICON; THERMAL EFFECTS; VACUUM; VAPOR DEPOSITION;

ALUMINA LAYER; IMIDIZATION; MULTI-LAYERED STRUCTURE; RF-MAGNETRON SPUTTERING; VAPOR DEPOSITION POLYMERIZATION;

ALUMINA;

EID: 33746589882     PISSN: 09145400     EISSN: 13486535     Source Type: Journal    
DOI: 10.2109/jcersj.114.713     Document Type: Article

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