Studies of fine pitch patterning by reel-to-reel processes for flexible electronic systems

Proceedings of the International Symposium and Exhibition on Advanced Packaging Materials Processes, Properties and Interfaces

Volumn 2005, Issue , 2005, Pages 130-135

  Drost, Andreas ^a   Klink, Gerhard ^a   Feil, Michael ^a   Bock, Karlheinz ^a  

^a Fraunhofer Institute Reliability and Microintegration   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; COST EFFECTIVENESS; ELECTRONIC STRUCTURE; ELECTROPLATING; ETCHING; PATTERN RECOGNITION; PHOTOLITHOGRAPHY;

ELECTROPLATING TECHNOLOGY; FINE PITCH PATTERNING; FLEXIBLE ELECTRONIC SYSTEMS; POLYMER ELECTRONICS;

CONSUMER ELECTRONICS;

EID: 33746571465     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISAPM.2005.1432062     Document Type: Conference Paper

References (3)

1. Karl Dietz, "Dry Film Photoresist Processing Technology", Electrochemical Publications Ltd. 2001
2. -rd Int. Workshop on Technology & Production - Processes for Flexible Electronic Systems, December 2, 2004, Munich.
3. G. Klink, "Reel-to-reel manufacturing of polymer electronics for low-cost applications", Flexible Displays & Electronics Conference 2004, San Francisco, CA, USA, April 26-28, 2004, Intertech