Ultra-low energy SIMS study of ultra-shallow boron implants in HPHT diamond

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 11, 2005, Pages 2148-2153

  De La Mata, B Guzmán ^a   Dowsett, M G ^a   Palitsin, V ^a  

^a UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM ENERGY; TRIM; ULTRA-SHALLOW BORON IMPLANTS; ZERO BEAM ENERGY;

ATOMIC BEAMS; BORON; CESIUM COMPOUNDS; COMPUTER SIMULATION; EXTRAPOLATION; ION IMPLANTATION;

DIAMONDS;

EID: 33746436720     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200561905     Document Type: Conference Paper

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