Process synthesis using TCAD: A mixed-signal case study

IEICE Transactions on Electronics

Volumn E82-C, Issue 6, 1999, Pages 976-982

  Smayling, Michael ^a   Rodriguez, John ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

Components; ESD circuit; Flash memory; LDMOS; Mixed signal process; Process integration; Process recipes

Indexed keywords

EID: 33746340930     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)

1. M. Smayling, J. Reynolds, D. Rcdwine, S. Keller, and G. Falessi, "A modular merged technology process including submicron CMOS logic, nonvolatile memories, linear functions, and power components," IEEE CICC Technical Digest, 25.5.1, 1993.
2. B. Murari, "Smart power technology and the evolution from protective umbrella to complete system," IEEE IEDM Technical Digest, 1.2.1., 1995.
3. PRISM Technology, Nikkei Microdevices, pp.46-47, Oct. 1993.
4. J. Rodriguez, "Process design and circuit model development," MS Dissertation, Rice University, 1994.
5. J. Rodriguez, M. Smayling, and W. Wilson, "BSD circuit synthesis and analysis using TCAD and SPICE," IEEE IEDM Technical Digest, 4.6.1., 1998.
6. J. Rodriguez, "ESD circuit synthesis and analysis using TCAD and SPICE," Ph.D. Dissertation, Rice University, 1999.