Finite element analysis of piezoelectric actuator with PMN-PT single crystals for nanopositioning

Current Applied Physics

Volumn 6, Issue 6 SPEC. ISS., 2006, Pages 1064-1067

  Kim, K C ^a   Kim, Y S ^b   Kim, H J ^a   Kim, S H ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

02.70.D; 77.65.D; 77.84; 85.50; Finite element analysis; Piezoelectric actuator; PMN PT single crystals

Indexed keywords

ACTUATORS; CERAMIC MATERIALS; COMPUTER AIDED DESIGN; COMPUTER SOFTWARE; FINITE ELEMENT METHOD; POSITION CONTROL; PRESSURE CONTROL; SINGLE CRYSTALS;

02.70.D; 77.65.D; 77.84; 85.50; PIEZOELECTRIC ACTUATOR; PMN-PT SINGLE CRYSTALS;

PIEZOELECTRIC MATERIALS;

EID: 33746293597     PISSN: 15671739     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cap.2005.07.020     Document Type: Article

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