Temperature dependence of the electrical and electromechanical properties of PZT thin films

Ferroelectrics

Volumn 293, Issue , 2003, Pages 89-99

  Maiwa, Hiroshi ^a   Ichinose, Noboru ^b  

^a SHONAN INSTITUTE OF TECHNOLOGY   (Japan)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

AFM; Domain pinning; MEMS; Piezoelectric properties; PZT

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC FIELDS; IRON COMPOUNDS; MICROELECTROMECHANICAL DEVICES; SPIN COATING; THICK FILMS;

DOMAIN PINNING; PIEZOELECTRIC PROPERTIES; PZT;

THIN FILMS;

EID: 33746273194     PISSN: 00150193     EISSN: 15635112     Source Type: Conference Proceeding    
DOI: 10.1080/00150190390238252     Document Type: Conference Paper

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