SnO2 target with controllable microstructure and thickness for generating extreme ultraviolet light

Journal of Applied Physics

Volumn 100, Issue 1, 2006, Pages

  Pan, Chao ^a   Gu, Zhong Ze ^a   Nagai, Keiji ^b   Shimada, Yoshinori ^b   Hashimoto, Kazuhisa ^b   Birou, Tomoya ^b   Norimatsu, Takayoshi ^b  

^a SOUTHEAST UNIVERSITY   (China)

^b OSAKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT EMISSION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; TIN COMPOUNDS;

ELECTROSPINNING; NANOFIBERS; TIN OXIDE; ULTRAVIOLET LIGHT EMISSION;

ULTRAVIOLET RADIATION;

EID: 33746210314     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2213179     Document Type: Article

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