Process analysis using RSM and simulation

European Solid-State Device Research Conference

Volumn , Issue , 1992, Pages 511-514

  Cecchetti, M ^a   Lissoni, M ^a   Lombardi, C ^a   Marmiroli, A ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; SOLID STATE DEVICES;

ELECTRICAL PARAMETER; FABRICATION LINES; FURNACE TEMPERATURES; PROCESS ANALYSIS; RESPONSE SURFACE METHOD; SATURATION CURRENT; SIMULATED RESULTS; STATISTICAL DISTRIBUTION;

THRESHOLD VOLTAGE;

EID: 33746137183     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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8. G. E. P. Box, N. R. Draper, "Empirical Model Building and Response Surface",New York: Wiley, 1987