Adhesive and wear properties of Indium Tin Oxide (ITO) thin films deposited by RF magnetron sputter

Key Engineering Materials

Volumn 317-318, Issue , 2006, Pages 381-384

  Kim, Y N ^a   Jeon, M S ^a   Shin, M C ^a   Lee, S M ^b   Lee, H S ^a  

^a Korea Testing Laboratory   (South Korea)

^b Korea Institute of Industrial Technology   (South Korea)

Author keywords

Acoustic signal; Electrical surface resistance; ITO thin film; Scratch; Wear

Indexed keywords

ACOUSTIC SIGNAL PROCESSING; ADHESIVES; ETCHING; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; WEAR OF MATERIALS;

ELECTRICAL SURFACE RESISTANCE; GLASS SUBSTRATES; INDIUM TIN OXIDE (ITO) THIN FILMS; SCRATCH;

THIN FILMS;

EID: 33746047607     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.317-318.381     Document Type: Conference Paper

References (7)

1. R. Stevens: Applied Optics Vol. 26 (1987), p. 3489
2. G.S. Chae: Jpn. J. Appl. Phys. Vol. 40 (2001), p. 1282
3. H. Oettel and R. Wiedemann: Surface and Coatings Tech. Vol. 76-77 (1995), p. 265
4. P.J. Burnett and D.S. Rickerby: Thin Solid Films Vol. 154 (1987), p. 403
5. B.S. Chiou, S.T. Hsieh and W.F. Wu: J. Am. Ceram. Soc. Vol. 77 (1994), p. 1740
6. W.F. Wu and B.S. Chiou: Thin Solid Films Vol. 293 (1997), p. 244
7. D.F. Lii, B.S. Yau, J.L. Huang, C.Y. Chen and W.T. Lo: J. Ceram. Soc. Jpn. Vol. 109 (2001), p. 9