Numerical simulation of HFCVD process used for diamond growth

Brazilian Journal of Physics

Volumn 36, Issue 2 A, 2006, Pages 313-316

  Barbosa, Divani C ^a   Nova, Hélcio F V ^a   Baldan, Mauricio R ^a  

^a INSTITUTO NACIONAL DE PESQUISAS ESPACIAIS   (Brazil)

Author keywords

Diamond growth; Hot filament chemical vapour deposition; Numerical simulation

Indexed keywords

EID: 33746041474     PISSN: 01039733     EISSN: 01039733     Source Type: Journal    
DOI: 10.1590/S0103-97332006000300021     Document Type: Conference Paper

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