Test results of a resonant integrated microbeam sensor (RIMS) for acoustic emission monitoring

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 326-332

  Schoess, Jeffrey N ^a   Zook, J David ^a  

^a HONEYWELL TECHNOLOGY CENTER   (United States)

Author keywords

Acoustic monitoring; Crack detection

Indexed keywords

ACOUSTIC EMISSIONS; ACOUSTIC MEASURING INSTRUMENTS; ACOUSTICS; CONCRETE BRIDGES; CRACK DETECTION; CRACKS; INDUSTRIAL EMISSIONS; INTELLIGENT STRUCTURES; MEMS; MICROCRYSTALLINE SILICON; MICROELECTROMECHANICAL DEVICES; MILITARY APPLICATIONS; SENSORS;

ACOUSTIC MONITORING; EMISSION MONITORING; FATIGUE CRACKS; FEATURE SIZES; FREQUENCY SENSITIVITY; HONEYWELL (CO); INDUSTRIAL CONTROLS; LABORATORY TESTING; MICRO BEAMS; SENSOR DESIGNS; SILICON MICROSTRUCTURES; TECHNICAL DESIGNS; TEST RESULTS;

ACOUSTIC EMISSION TESTING;

EID: 33745960408     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320185     Document Type: Conference Paper

References (3)

1. J.N. Schoess and J.D. Zook. "Conformal acoustic waveguide sensor development," SPIE Paper No. 1918-09, Smart Structure and Materials Conference, Albuquerque, NM, 1993.
2. D.W. Burns, J.D. Zook, D.K. Arch, and R.E. Strawser, "Resonant integrated microsensors," GOMAC '93, New Orleans, LA, 1993.
3. H. Guckel, M. Wesnidal, J.D. Zook, and D.W. Burns, D.W. "Optical drive/sense for high-Q resonant microbeams," Technical Digets of 7th International Conference on Solid-State Sensors and Actuators, pp. 686-689, 1993.