Electromechanical analysis of a micromachined comb-drive actuator by admittance measurement

IEEJ Transactions on Sensors and Micromachines

Volumn 126, Issue 7, 2006, Pages 281-285

  Ayano, Kenjiro ^a,d   Suzuki, Katuyori ^a   Hashiguchi, Gen ^a   Fujita, Hiroyuki ^b,c,e,f,g  

^a KAGAWA UNIVERSITY   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

^d AOI Electronics Ltd   (Japan)

^e Center for International Research on Micromechatronics   (Japan)

^f IEEE   (Japan)

^g IEEE ^*  (Japan)

Author keywords

Admittance measurement; Comb drive actuator; Electrochemical Analysis

Indexed keywords

ADMITTANCE MEASUREMENT; COMB-DRIVE ACTUATOR; ELECTROCHEMICAL ANALYSIS; MECHANICAL PARAMETERS;

ELECTRIC EQUIPMENT; ELECTROMECHANICAL DEVICES; MECHANICAL PROPERTIES; MICROMACHINING; NETWORKS (CIRCUITS); PARAMETER ESTIMATION;

MICROACTUATORS;

EID: 33745767520     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.126.281     Document Type: Article

References (2)

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2. C. Liang, F. Sun, and C.A. Rogers: "Electro-mechanical impedance modeling of active material systems", Smart Mater. Struct. Vol.5, pp.171-186 (1996)