Predicted and realized improved performances of PZT film-silicon based structures for integrated pyrosensorics

Integrated Ferroelectrics

Volumn 80, Issue 1, 2006, Pages 3-9

  Bravina, S L ^a   Morozovsky, N V ^a   Eliseev, E A ^b   Cattan, E ^c   Remiens, D ^c   Wang, G S ^c   Grosman, A ^d  

^a INSTITUTE OF PHYSICS   (Ukraine)

^b FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^c UNIVERSITÉ DE VALENCIENNES   (France)

^d INSTITUT DES NANOSCIENCES DE PARIS   (France)

Author keywords

P(VDF TrFE); Porous Si; Pyroelectric response; PZT

Indexed keywords

PYROELECTRICITY; SPIN COATING; SPUTTER DEPOSITION; SUBSTRATES; THEOREM PROVING; THIN FILMS;

PYROELECTRIC DETECTORS; PYROELECTRIC RESPONSES; PYROSENSORICS; UNDER-SURFACE PROBING;

POROUS SILICON;

EID: 33745742873     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600655603     Document Type: Article

References (7)

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