The design and control of a three-dimensional piezoceramic tube scanner with an inertial slider

Review of Scientific Instruments

Volumn 77, Issue 6, 2006, Pages

  Chao, Shih Hui ^a   Garbini, Joseph L ^a   Dougherty, William M ^a   Sidles, John A ^b  

^a University of Washington   (United States)

^b UNIVERSITY OF WASHINGTON SCHOOL OF MEDICINE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INERTIAL SLIDERS; PIEZOCERAMIC TUBE SCANNER; PIEZOELECTRIC SENSING; SCANNING PROBE MICROSCOPES;

COMPUTER SIMULATION; FEEDBACK CONTROL; PIEZOELECTRIC DEVICES; THREE DIMENSIONAL;

PRODUCT DESIGN;

EID: 33745700195     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2210172     Document Type: Article

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