Non-isothermal electroless plating for microfabrication

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao

Volumn 26, Issue 6, 2005, Pages 729-734

  Ou, Jinn Luh ^a   Shan, Yu Yung ^a   Sung, Yuh ^a   Chou, Yu Hsien ^b   Ger, Ming Der ^b  

^a CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b NATIONAL DEFENSE UNIVERSITY   (Taiwan)

Author keywords

Insulating material; Microfabrication; Nickel phosphorous; Non isothermal deposition; Wafer

Indexed keywords

EID: 33745652448     PISSN: 02579731     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)