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Volumn 6151 II, Issue , 2006, Pages

Studies on cryogenic Xe capillary jet target for laser-produced plasma EUV-Iiglit source

Author keywords

Debris free; Fast supplying; Laser produced plasma EUV source; Mass limited target; Xe capillary jet

Indexed keywords

CAPILLARITY; CRYOGENICS; DEBRIS; IRRADIATION; KINETIC ENERGY; NOZZLES; NUMERICAL METHODS; VACUUM TECHNOLOGY; XENON;

EID: 33745633320     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656096     Document Type: Conference Paper
Times cited : (2)

References (9)
  • 5
    • 33745586434 scopus 로고    scopus 로고
    • P.E. Nica, T. Inoue, S. Miyamoto, S. Amano, A. Shimoura, and T. Mochizuki, to be submitted (2006).
    • (2006)
  • 9
    • 33745614213 scopus 로고    scopus 로고
    • ed. by J.M. Saleh, (McGraw-Hill, New York), Chap. 8
    • T.C. Ho, Fluid Handbook, ed. by J.M. Saleh, (McGraw-Hill, New York, 2002) Chap. 8.
    • (2002) Fluid Handbook
    • Ho, T.C.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.