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Volumn 6151 II, Issue , 2006, Pages
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Studies on cryogenic Xe capillary jet target for laser-produced plasma EUV-Iiglit source
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Author keywords
Debris free; Fast supplying; Laser produced plasma EUV source; Mass limited target; Xe capillary jet
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Indexed keywords
CAPILLARITY;
CRYOGENICS;
DEBRIS;
IRRADIATION;
KINETIC ENERGY;
NOZZLES;
NUMERICAL METHODS;
VACUUM TECHNOLOGY;
XENON;
DEBRIS-FREE;
FAST-SUPPLYING;
LASER-PRODUCED PLASMA EUV SOURCES;
MASS-LIMITED TARGETS;
XE CAPILLARY JETS;
LITHOGRAPHY;
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EID: 33745633320
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.656096 Document Type: Conference Paper |
Times cited : (2)
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References (9)
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