Novel techniques for in-line acquisition of microstructure profiles

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 I, Issue , 2006, Pages

  Marchman, H ^a  

^a PHOTRONICS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEVELOPMENT LEARNING; ELECTRON BEAM TOOLS; FOCUSED ION BEAM (FIB); MICROSTRUCTURE PROFILES;

ATOMIC FORCE MICROSCOPY; IMAGING SYSTEMS; INTEGRATED CIRCUIT LAYOUT; PASSIVATION; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; SURFACE TOPOGRAPHY;

MICROSTRUCTURE;

EID: 33745586545     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656971     Document Type: Conference Paper

References (0)