Structural design of acid-decomposable dissolution inhibitors for a three-components positive chemical amplification resist

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2195, Issue , 1994, Pages 111-125

  Aoai, Toshiaki ^a   Yamanaka, Tsukasa ^a   Kokubo, Tadayoshi ^a  

^a FUJIFILM CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOLUTION; EXCIMER LASERS; FLUORINE COMPOUNDS; SPECTRUM ANALYSIS; STRUCTURAL DESIGN;

CHEMICAL AMPLIFICATION; CONFORMATIONAL ANALYSIS; HYDROPHILIC SITES; INHIBITION EFFICIENCY; INHIBITION MECHANISMS; MOLECULAR INTERACTION MODELS; STRUCTURAL INFLUENCES; THREE ORDERS OF MAGNITUDE;

BINDERS;

EID: 33745528844     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.175329     Document Type: Conference Paper

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