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Volumn 3, Issue , 2006, Pages 2274-2277

Piezoelectric properties of thin AlN layers for MEMS application determined by piezoresponse force microscopy

Author keywords

[No Author keywords available]

Indexed keywords

ACCEPTABLE TOLERANCE; INTERFEROMETRIC TECHNIQUE; PIEZORESPONSE FORCE MICROSCOPY; WURTZITE ALN THIN FILMS WERE; 73.61.EY; 77.84.BW; 81.15.CD; 81.15.GH; INTERFEROMETRIC TECHNIQUES; INVERSE PIEZOELECTRIC EFFECTS; POLYCRYSTALLINE THIN FILM;

EID: 33745500126     PISSN: 18626351     EISSN: None     Source Type: Journal    
DOI: 10.1002/pssc.200565123     Document Type: Conference Paper
Times cited : (29)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.