Innovative window layer for amorphous silicon/amorphous silicon carbide UV sensor

Journal of Non-Crystalline Solids

Volumn 352, Issue 9-20 SPEC. ISS., 2006, Pages 1818-1821

  Caputo, D ^a   de Cesare, G ^a   Nascetti, A ^a   Tucci, M ^a,b  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

^b ENEA   (Italy)

Author keywords

Heterojunctions; Sensors; Silicon

Indexed keywords

DEPOSITION; HETEROJUNCTIONS; SENSORS; SILICON CARBIDE; THIN FILMS; ULTRAVIOLET DEVICES; ULTRAVIOLET RADIATION;

CHROMIUM SILICIDE FILM; FINGER ELECTRODES; GLASS SUBSTRATE; WINDOW LAYER;

AMORPHOUS SILICON;

EID: 33745471384     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2005.09.052     Document Type: Article

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