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Volumn 352, Issue 23-25, 2006, Pages 2332-2334
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High quality MOCVD GaN film grown on sapphire substrates using HT-AlN buffer layer
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Author keywords
Atomic force and scanning tunneling microscopy; Chemical vapor deposition; Crystal growth; X ray diffraction
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
CRYSTAL GROWTH;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
OPTIMIZATION;
SAPPHIRE;
SCANNING TUNNELING MICROSCOPY;
SUBSTRATES;
THERMAL EFFECTS;
THIN FILMS;
X RAY DIFFRACTION;
AL2O3;
FULL WIDTH AT HALF MAXIMUM (FWHM);
HT-ALN BUFFER LAYER;
SAPPHIRE SUBSTRATES;
GALLIUM NITRIDE;
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EID: 33745388027
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2006.01.099 Document Type: Article |
Times cited : (15)
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References (13)
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