The mass production technology of Pb(Zr, Ti)O 3 piezoelectric thin film by radio frequency magnetron sputtering

Shinku/Journal of the Vacuum Society of Japan

Volumn 49, Issue 3, 2006, Pages 174-176

  Kimura, Isao ^a   Nishioka, Yutaka ^a   Kikuchi, Shin ^a   Suu, Koukou ^a  

^a ULVAC INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION TEMPERATURE; FERROELECTRIC TEST SYSTEM; MASS PRODUCTION SYSTEM; PIEZOELECTRIC THIN FILMS;

ATOMIC FORCE MICROSCOPY; FERROELECTRIC MATERIALS; MAGNETRON SPUTTERING; PIEZOELECTRIC DEVICES; POLARIZATION;

THIN FILMS;

EID: 33745278592     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.49.174     Document Type: Article

References (9)

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