Atomistic calculation of elastic moduli in strained silicon

Semiconductor Science and Technology

Volumn 21, Issue 7, 2006, Pages 906-911

  Zhu, R ^a   Pan, E ^a   Chung, P W ^b   Cai, X ^c   Liew, K M ^d   Buldum, A ^e  

^a The University of Akron   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

^c NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^d CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^e UNIVERSITY OF AKRON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTINUUM MECHANICS; MOLECULAR DYNAMICS; POISSON RATIO; STIFFNESS; STRAIN;

ELASTIC STIFFNESSES; FREE STRAINED MODULI; STILLINGER-WEBER POTENTIAL; VOLUMETRIC STRAIN;

SILICON;

EID: 33745227387     PISSN: 02681242     EISSN: 13616641     Source Type: Journal    
DOI: 10.1088/0268-1242/21/7/014     Document Type: Article

References (25)

1. Bimberg D, Grundmann M and Ledentsov N N 1998 Quantum Dot Heterostructures (Chichester: Wiley)
2. Gleize J, Demangeot F, Frandon J, Renucci M A, Widmann F and Daudin B 1999 Appl. Phys. Lett. 74 703
3. Jain S C, Willander M, Narayan J and Van Overstraeten R 2000 J. Appl. Phys. 87 965
4. Jogai B 1998 Phys. Rev. B 57 2382
5. Park S-H and Chuang S-L 1999 Phys. Rev. B 59 4725
6. Ghani T et al 2003 Proc. IEDM p 978
7. Mcskimin H J and Andreatch P 1964 J. Appl. Phys. 35 2161
8. Karki B B, Ackland G J and Crain J 1997 J. Phys.: Condens. Matter 9 8579
9. Stillinger F H and Weber T A 1985 Phys. Rev. B 31 5262
10. Kluge M D, Ray J R and Rahman A 1986 J. Chem. Phys. 85 4028
11. Humbird D and Graves D B 2004 Plasma Sources Sci. Technol. 13 548
12. Menon M, Srivastava D, Ponomareva I and Chernozatonskii L A 2004 Phys. Rev. B 70 125313
13. Mehl M J, Osburn J E, Papaconstantopoulos D A and Klein B M 1990 Phys. Rev. B 41 10311
14. Mehl M J 1993 Phys. Rev. B 47 2493
15. Ellaway S W and Faux D A 2002 J. Appl. Phys. 92 3027
16. Ray J R 1988 Phys. Rep. 8 109
17. Birch F 1978 J. Geophys. Res. 83 1257
18. Tersoff J 1988 Phys. Rev. B 38 9902
19. Baskes M I, Nelson J S and Wright F A 1989 Phys. Rev. B 40 6085
20. Biswas R and Hamann D R 1985 Phys. Rev. Lett. 55 2001
21. Cowley E R 1998 Phys. Rev. Lett. 60 2379
22. Cook S J and Clancy P 1993 Phys. Rev. B 47 7686
23. Balamane H, Halicioglu T and Tiller W A 1992 Phys. Rev. B 46 2250
24. Levinshtein M, Rumyantsev S and Shur M 1996 Handbook Series on Semiconductor Parameters vol 1 (Singapore: World Scientific)
25. Crosby T R, Jones K S, Law M E, Saavedra A F, Hansen J L, Larsen A N and Liu J 2004 Mater. Res. Soc. Symp. Proc. 810 C4.12.1