SCOPUS 정보 검색 플랫폼

Volumn 16, Issue 3, 2000, Pages 348-350

Composition control of alloy coatings and composition design of cathode targets in multi-arc ion plating

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33745137311 PISSN: 10050302 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (7)

References (8)

1
- 84903634963
- Y.Tanaka, T.M.Gür, M.Kelly, S.B.Hagstrom, T.Ikeda, K.Wakihira and H.Satoh: J. Vac. Sci. Technol., 1992, A10(4), 1749.
- (1992) J. Vac. Sci. Technol. , vol.A10 , Issue.4 , pp. 1749
- Tanaka, Y.¹ Gür, T.M.² Kelly, M.³ Hagstrom, S.B.⁴ Ikeda, T.⁵ Wakihira, K.⁶ Satoh, H.⁷

2
- 0023440298
- H.Randhawa and P.C.Johnson: Surf. Coatings Technol., 1987, 31, 303.
- (1987) Surf. Coatings Technol. , vol.31 , pp. 303
- Randhawa, H.¹ Johnson, P.C.²

3
- 0023703764
- I.Penttinen, J.M.Molarius and A.S.Korhonen: J. Vac. Sci. Technol., 1988, A(6), 2158.
- (1988) J. Vac. Sci. Technol. , vol.A , Issue.6 , pp. 2158
- Penttinen, I.¹ Molarius, J.M.² Korhonen, A.S.³

4
- 33746723117
- P.A.Lindfors, W.M.Mularie and G.K.Wehner: Surf. Coatings Technol., 1986, 29, 284.
- (1986) Surf. Coatings Technol. , vol.29 , pp. 284
- Lindfors, P.A.¹ Mularie, W.M.² Wehner, G.K.³

5
- 0023436325
- H.Freller and H.Haessler: Thin Solid Films, 1987, 153, 67.
- (1987) Thin Solid Films , vol.153 , pp. 67
- Freller, H.¹ Haessler, H.²

6
- 33746742546
- C.W.Kimblin: J. Appl. phys., 1973, 44(7), 3078.
- (1973) J. Appl. Phys. , vol.44 , Issue.7 , pp. 3078
- Kimblin, C.W.¹

7
- 0343816544
- H.Randhawa, P.C.Johnson and R.Cunningham: J. Vac. Sci. Technol., 1988, A6(3), 2138.
- (1988) J. Vac. Sci. Technol. , vol.A6 , Issue.3 , pp. 2138
- Randhawa, H.¹ Johnson, P.C.² Cunningham, R.³

8
- 84995581539
- in Chinese
- Jun ZHANG: Vacuum, 1994, (4), 44. (in Chinese)
- (1994) Vacuum , Issue.4 , pp. 44
- Zhang, J.¹

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