Effects of impurities on the damage and property for HfO2 coating material

Xiyou Jinshu Cailiao Yu Gongcheng/Rare Metal Materials and Engineering

Volumn 35, Issue 5, 2006, Pages 757-760

  Wu, Shigang ^a   Shao, Jianda ^a   Yi, Kui ^a   Zhao, Yuanan ^a   Fan, Zhengxiu ^a  

^a SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS   (China)

Author keywords

Absorption dielectric; HfO2 coating material; Impurities; Metal element; Negative ion element; Zr element

Indexed keywords

EID: 33745122521     PISSN: 1002185X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (6)