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Journal of Applied Physics

Volumn 77, Issue 1, 1995, Pages 175-186

Oxygen gettering and oxide degradation during annealing of Si/SiO 2/Si structures

(6) Devine, R A B a Warren, W L b Xu, J B c Wilson, I H c Paillet, P d Leray, J L d

a ORANGE LABS (France)

b SANDIA NATIONAL LABORATORIES (United States)

c Chinese University (Hong Kong)

d CEA DIF (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33744807323 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.359365 Document Type: Article

Times cited : (64)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.