On-wafer measurements of tuneability in Ba0.5Sr 0.5TiO3 thin films

Integrated Ferroelectrics

Volumn 61, Issue , 2004, Pages 133-137

  Suherman, P M ^a   Jackson, T J ^a   Koutsonas, Y ^a   Chakalov, R A ^a   Lancaster, M J ^a  

^a UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Barium strontium titanate; Ferroelectric; On wafer measurement; Thin film; Tuneability

Indexed keywords

BARIUM COMPOUNDS; DIELECTRIC PROPERTIES; ELECTRIC LINES; FERROELECTRIC MATERIALS; MICROWAVE DEVICES; NATURAL FREQUENCIES;

BARIUM STRONTIUM TITANATE; METALLIC COPLANAR TRANSMISSION LINES; ON WAFER MEASUREMENT; TUNEABILITY;

THIN FILMS;

EID: 33744788433     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580490459044     Document Type: Article

References (5)

1. S. Gevorgian, "Basic characteristics of two layered substrate coplanar waveguides," Elect. Lett. 30, 1236-1237 (1994).
2. D. M. Pozar, Microwave Engineering. New York: John Wiley & Sons (1998).
3. E. K. Hollmann, O. G. Vendik, A. G. Zaitsev, and B. T. Melekh, "Substrates for high-Tc superconductor microwave integrated circuits," Supercond. Sci. Technol. 7, 609-622 (1994).
4. 3," J. Appl. Phys. 92, 6165-6171 (2001).
5. I. B. Vendik, O. G. Vendik, and E. L. Kollberg, "Commutation quality factor of two-state switchable devices." IEEE. Trans. MTT 48, 802-807 (2000).