Anatase titanium dioxide film deposited by DC reactive magnetron sputtering

Bandaoti Guangdian/Semiconductor Optoelectronics

Volumn 27, Issue 2, 2006, Pages

  Zhang, Li Wei ^a,b   Guo, Yun De ^c   Ren, Shi Chao ^c   Song, Jin Sheng ^c   Lu, Jing Xiao ^a  

^a ZHENGZHOU UNIVERSITY   (China)

^b Department of Mathematics   (China)

^c An'yang Quality Technical Director Examination Test Center   (China)

Author keywords

Anatase; DC reactive magnetron sputtering; TiO2 thin film

Indexed keywords

EID: 33744773820     PISSN: 10015868     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (16)