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Volumn 67, Issue 8, 1990, Pages 3693-3699

Direct determination of absolute monolayer coverages of chemisorbed C 2H2 and C2H4 on Si(100)

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EID: 33744712058     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.345326     Document Type: Article
Times cited : (152)

References (23)
  • 1
    • 84950581720 scopus 로고
    • See Chemical Perspectives of Microelectronic MaterialsMaterials Research Symposia Proceedings, Boston, MA, edited by (Materials Research Society, Pittsburgh, PA)
    • (1989) , vol.131
    • Gross, M.E.1    Jasinski, J.M.2    Yates, J.T.3
  • 16
    • 84881043344 scopus 로고
    • Measurements of background pressure were made with the mass spectrometer calibrated against the ionization gauge corrected for its sensitivity to hydrocarbon gas. See
    • (1974) Jpn. J. Appl. Phys. Suppl. , vol.2 , pp. 113
    • Nakayama, K.1    Hojo, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.