Proposal of solidly mounted resonator type functional devices

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 5 B, 2006, Pages 4634-4637

  Uno, Takehiko ^a   Fujitsuka, Shun ^a   Noge, Satoru ^a  

^a KANAGAWA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Bulk acoustic wave; GHz band device; Multimode filter; Piezoelectric thin film; SMR; Solidly mounted resonator

Indexed keywords

ACOUSTIC WAVES; COMPUTER SIMULATION; FABRICATION; PIEZOELECTRIC DEVICES; THIN FILMS;

BULK ACOUSTIC WAVE; GHZ BAND DEVICE; MULTIMODE FILTER; PIEZOELECTRIC THIN FILM; SMR; SOLIDLY MOUNTED RESONATOR;

RESONATORS;

EID: 33744470865     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.4634     Document Type: Article

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