메뉴 건너뛰기




Volumn 112, Issue 1, 1992, Pages 1-17

Discrimination effects for ions with high initial kinetic energy in a Nier-type ion source and partial and total electron ionization cross-sections of CF4

Author keywords

carbon tetrafluoride; cross section; discrimination effect; ion trajectory calculations

Indexed keywords


EID: 33646990259     PISSN: 01681176     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-1176(92)87029-E     Document Type: Article
Times cited : (86)

References (43)
  • 21
    • 84910751558 scopus 로고
    • Idaho National Engineering Laboratory, EG & G Idaho Inc, Idaho Falls, ID
    • (1987) SIMION, Version 3.0
  • 36
    • 84912925539 scopus 로고    scopus 로고
    • H. Nishimura, in K. Tachibana (Ed.), Proc. 8th Symp. Plasma Processing, Nagoya, Japan, pp. 333-336.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.