Modeling gate oxide short defects in CMOS minimum transistors

Proceedings of the European Test Workshop

Volumn 2002-January, Issue January, 2002, Pages 15-20

  Renovell, M ^a   Galliere J M ^a   Azais F ^a   Bertrand, Y ^a  

^a LIRMM   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; GATES (TRANSISTOR); MOS DEVICES;

ELECTRICAL BEHAVIORS; GATE OXIDE SHORTS;

TRANSISTORS;

EID: 33646946398     PISSN: 15301877     EISSN: 15581780     Source Type: Conference Proceeding    
DOI: 10.1109/ETW.2002.1029634     Document Type: Conference Paper

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