Off-axis illumination - Working principles and comparison with alternating phase-shifting masks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1927, Issue , 1993, Pages 89-100

  Lin, B J ^a  

^a Linnovation Inc ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL RESOLVING POWER;

ALTERNATING PHASE SHIFTING MASK; ANALYTICAL FORMS; COHERENT ILLUMINATION; DEPTH OF FOCUS; IMAGING PERFORMANCE; OFF AXIS ILLUMINATION; OPTICAL PROJECTIONS; PARTIAL COHERENT;

PHOTOLITHOGRAPHY;

EID: 33646943465     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.150417     Document Type: Conference Paper

References (7)

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5. B. J. Lin, J. Opt. Soc. Am. vol. 62, p. 977, 1972.
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7. A. S. Wong, D. M. Newmark, J. B. Rolfson, R. J. Whiting, A. R. Neureuther, Proceedings IEDM-91, 1991.