Micro-machining processes for microsystem technology

Microsystem Technologies

Volumn 12, Issue 7, 2006, Pages 659-664

  Denkena, B ^a   Hoffmeister, H W ^b   Reichstein, M ^a   Illenseer, S ^b   Hlavac, M ^b  

^a LEIBNIZ UNIVERSITY HANNOVER   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND CUTTING TOOLS; DRILLING; GRINDING (MACHINING); MICROSENSORS; TUNGSTEN CARBIDE;

DIAMOND TOOLS; GRINDING DRILLING; MICRO TECHNOLOGY;

MICROMACHINING;

EID: 33646930159     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0089-z     Document Type: Article

References (9)

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2. Denkena B, Kopp D, Reichstein M (2002) Aktive Führungen für Mikrosysteme - Untersuchungen zur Auslegung und Fertigungsentwicklung, wt Werkstattstechnik online, www.technik-wissen.de/wt/2002/11/20.htm, H. 11(12):S645-S649
3. Denkena B, Friemuth T, Reichstein M (2003) Potentials of different process kinematics in micro grinding. Ann CIRP 52(1):463-466
4. Gomes JF, Dornfeld DA (2001) Application of AE contact sensing in reliable grinding monitoring. Ann CIRP 50(1)
5. Hesselbach J (ed) (2000) mikroPRO - Untersuchung zum internationalen Stand der Mikroproduktionstechnik. Vulkan Verlag Essen
6. Hoffmeister H-W, Illenseer S (2004) Burr formation and reduction in micro drilling of metals. Prod Eng WGP 11(1):l-4
7. Tönshoff HK, Denkena B, Friemuth T, Reichstein M (2003) Precision grinding of components for aerostatic micro guidance. Precis Eng 27:185-188
8. Weck M (2001) Ultraprecision machining of micro-components. In: Proceedings of international seminar on precision engineering and micro technology, Aachen, pp 113-122
9. Weck M (ed) (2003) Mikromechanische Produktionstechnik. Abschlusskolloquium DFG Schwerpunktprogramm 1012, Aachen, 21 Mai 2003, Shaker Verlag Aachen