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Volumn 116, Issue 1-2, 2006, Pages 2-10

Silicone polymer chemical vapor sensors fabricated by direct polymer patterning on substrate technique (DPPOST)

Author keywords

Electronic nose; RTV; Silicone carbon black chemical vapor sensors; Soft polymer patterning

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRONIC EQUIPMENT; MICROELECTROMECHANICAL DEVICES; PHOTOLITHOGRAPHY; POLYMERS; SIGNAL NOISE MEASUREMENT; SILICONES; SUBSTRATES;

EID: 33646857923     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.11.086     Document Type: Article
Times cited : (15)

References (22)
  • 1
    • 0036141528 scopus 로고    scopus 로고
    • Electrowetting and electrowetting-on-dielectric for microscale liquid handling
    • Lee J., Moon H., Fowler J., Schoellhammer T., and Kim C.-J. Electrowetting and electrowetting-on-dielectric for microscale liquid handling. Sensor Actuator A-Phys. 95 (2002) 259-268
    • (2002) Sensor Actuator A-Phys. , vol.95 , pp. 259-268
    • Lee, J.1    Moon, H.2    Fowler, J.3    Schoellhammer, T.4    Kim, C.-J.5
  • 2
    • 27544484401 scopus 로고    scopus 로고
    • Micro seismic power generator using electret polymer film
    • Kyoto, Japan, 28-30 November
    • Arakawa Y., Suzuki Y., and Kasagi N. Micro seismic power generator using electret polymer film. Tech. Digest of Power MEMS. Kyoto, Japan, 28-30 November (2004-2004) 187-190
    • (2004) Tech. Digest of Power MEMS , pp. 187-190
    • Arakawa, Y.1    Suzuki, Y.2    Kasagi, N.3
  • 4
    • 0034205540 scopus 로고    scopus 로고
    • Use of SU-8 photoresist for very high aspect ratio X-ray lithography
    • Bogdanov A.L., and Peredkov S.S. Use of SU-8 photoresist for very high aspect ratio X-ray lithography. Microelectron. Eng. 53 (2000) 493-496
    • (2000) Microelectron. Eng. , vol.53 , pp. 493-496
    • Bogdanov, A.L.1    Peredkov, S.S.2
  • 6
    • 0034615958 scopus 로고    scopus 로고
    • Monolithic microfabricated valves and pumps by multilayer soft lithography
    • Unger M.A., Chou H.-P., Thorsen T., Scherer A., and Quake S.R. Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288 (2000) 113-116
    • (2000) Science , vol.288 , pp. 113-116
    • Unger, M.A.1    Chou, H.-P.2    Thorsen, T.3    Scherer, A.4    Quake, S.R.5
  • 7
    • 3142682230 scopus 로고    scopus 로고
    • Microsensors and actuators for macrofluidic control
    • Huang A., Lew J., Xu Y., Tai Y.-C., and Ho C.-M. Microsensors and actuators for macrofluidic control. IEEE Sen. J. 4 (2004) 494-502
    • (2004) IEEE Sen. J. , vol.4 , pp. 494-502
    • Huang, A.1    Lew, J.2    Xu, Y.3    Tai, Y.-C.4    Ho, C.-M.5
  • 10
    • 0037073161 scopus 로고    scopus 로고
    • Decal transfer microlithography: a new soft-lithographic patterning method
    • Childs W.R., and Nuzzo R.G. Decal transfer microlithography: a new soft-lithographic patterning method. J. Am. Chem. Soc. 124 (2002) 13583-13596
    • (2002) J. Am. Chem. Soc. , vol.124 , pp. 13583-13596
    • Childs, W.R.1    Nuzzo, R.G.2
  • 11
    • 33646893031 scopus 로고    scopus 로고
    • K.S. Ryu, K. Shaikh, C. Liu, A method to monolithically integrate elastomer O-rings on parylene membranes for improved valve sealing, in: Proc MicroTAS, 2003, pp. 343-346.
  • 12
    • 4344680330 scopus 로고    scopus 로고
    • A method of precision patterning of silicone elastomer and its applications
    • Ryu K.S., Wang X., Shaikh K., and Liu C. A method of precision patterning of silicone elastomer and its applications. J. Microelectromech. Syst. 13 4 (2004) 568-575
    • (2004) J. Microelectromech. Syst. , vol.13 , Issue.4 , pp. 568-575
    • Ryu, K.S.1    Wang, X.2    Shaikh, K.3    Liu, C.4
  • 14
    • 33646884597 scopus 로고    scopus 로고
    • V.T.S. Wong, A. Huang, C.M., Ho, Toward high density silicone polymeric chemical vapor sensor arrays, in: Proceedings of the 11th Inernational Symposium on Olaf. and Electronic Nose (ISOEN), Barcelona, Spain, 13-15 April 2005, pp. 398-401.
  • 15
  • 16
    • 0142218000 scopus 로고    scopus 로고
    • Characterization of the temporal response profile of carbon black-polymer composite detectors to volatile organic vapors
    • Briglin S.M., and Lewis N.S. Characterization of the temporal response profile of carbon black-polymer composite detectors to volatile organic vapors. J. Phys. Chem. B 107 40 (2003) 11031-11042
    • (2003) J. Phys. Chem. B , vol.107 , Issue.40 , pp. 11031-11042
    • Briglin, S.M.1    Lewis, N.S.2
  • 17
    • 0141774567 scopus 로고    scopus 로고
    • Effects of electrode configuration on polymer carbon-black composite chemical vapor sensor performance
    • Matthews B., Li J., Sunshine S., Lerner L., and Judy J.W. Effects of electrode configuration on polymer carbon-black composite chemical vapor sensor performance. IEEE Sens. J. 2 3 (2002) 160-168
    • (2002) IEEE Sens. J. , vol.2 , Issue.3 , pp. 160-168
    • Matthews, B.1    Li, J.2    Sunshine, S.3    Lerner, L.4    Judy, J.W.5
  • 18
    • 0035155450 scopus 로고    scopus 로고
    • Micromachined polymer-based chemical gas sensor array
    • Zee F., and Judy J.W. Micromachined polymer-based chemical gas sensor array. Sensor Actuator B-Chem. 72 2 (2001) 120-128
    • (2001) Sensor Actuator B-Chem. , vol.72 , Issue.2 , pp. 120-128
    • Zee, F.1    Judy, J.W.2
  • 19
    • 33646889513 scopus 로고    scopus 로고
    • J.A. Dickson, M.S. Freund, N.S. Lewis, R.M. Goodman, An integrated chemical sensor arrays using carbon black polymers and a standard CMOS process, in: Proceedings of the Solid-State Sensors and Actuators Workshop, Hilton Head Island, SC, June 2000, pp. 162-165.
  • 20
    • 33646895149 scopus 로고    scopus 로고
    • M.A. Ryan, M.L. Homer, H. Zhou, K.S. Manatt, V.S. Ryan, S.P. Jackson, Operation of an electronic nose aboard the space shuttle and direction for research for a second generation device, in: Proceedings of the 30th International Conference on Environmental System, Toulouse, France, July 2000, paper no.: 00ICES-259.
  • 21
    • 0034652658 scopus 로고    scopus 로고
    • An investigation of the concentration dependence and response to analyte mixtures of carbon black/insulating organic polymer composite vapor detectors
    • Severin E.J., Doleman B.J., and Lewis N.S. An investigation of the concentration dependence and response to analyte mixtures of carbon black/insulating organic polymer composite vapor detectors. Anal. Chem. 72 4 (2000) 658-668
    • (2000) Anal. Chem. , vol.72 , Issue.4 , pp. 658-668
    • Severin, E.J.1    Doleman, B.J.2    Lewis, N.S.3
  • 22
    • 0026104208 scopus 로고
    • Solubility interactions and the design of chemically selective sorbent coatings for chemical sensors and arrays
    • Grate J.W., and Abraham M.H. Solubility interactions and the design of chemically selective sorbent coatings for chemical sensors and arrays. Sensor Actuator B-Chem. 3 (1991) 85-111
    • (1991) Sensor Actuator B-Chem. , vol.3 , pp. 85-111
    • Grate, J.W.1    Abraham, M.H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.