Reducing photoelectric response when functionally trimming with lasers

Proceedings of the IEEE

Volumn 90, Issue 10, 2002, Pages 1620-1626

  Sun, Yunlong ^b   Swenson, Edward J ^a,b   Barcey, Russ ^a,c,d  

^a IEEE

^b Electro Scientific Industries Inc   (United States)

^c TI/Burr Brown   (United States)

^d Society of Photo Optical Instrumentation Engineers (SPIE)   (Germany)

Author keywords

Functional trimming; Laser; Photoelectric response; Trimming

Indexed keywords

PHOTOELECTRICITY; SEMICONDUCTOR DEVICES; SILICON; THICK FILMS; THIN FILM CIRCUITS; TRIMMING;

FUNCTIONAL TRIMMING; LASER PROCESSING TECHNOLOGY; PHOTOELECTRIC RESPONSE; SILICON BASED STRUCTURES; THICK-FILM HYBRID CIRCUITS;

LASER THEORY;

EID: 33646774655     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/JPROC.2002.803667     Document Type: Review

References (8)

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3. A. Kestenbaum and T. F. Baer, "Photoexcitation effects during laser trimming of thin-film resistors on Silicon," IEEE Trans. Comp., Hybrids Manufact. Technol., vol. CHMT-3, pp. 166-171, Mar. 1980.
4. R. H. Wagner, "Functional laser trimming: An overview," Proc. SPIE, vol. 611, pp. 8-17, Jan. 1986.
5. E. J. Swenson and Y. Sun, "Method for Laser Functional Tuning of Films and Devices," U.S. Patent 5 685 995, Nov. 11, 1997.
6. R. Barcey, E. J. Swenson, and Y. Sun, "Reducing optoelectric response on Silicon integrated circuits," in Proc. IEEE Electronic Components and Technology Conf., May 1996.
7. J. E. Lapham and T. D. Clark, "Laser Trimming on Circuit Elements on Semiconductive Substrates," U.S. Patent 4 399 345, Jan. 9, 1981.
8. A. J. Camilleri, Y. Sun, and E. J. Swenson, "Functional tuning of hybrids: A fresh look at an old problem," Adv. Packag., pp. 41-43, Jan. 2002.