Key techniques influencing the linewidth evenness grade with laser direct writing on the spherical surface

Guangdian Gongcheng/Opto-Electronic Engineering

Volumn 33, Issue 3, 2006, Pages 1-4

  Hu, Jun ^a   Liang, Feng Chao ^a,b   Xiong, Mu Di ^c   Zou, Zhen Shu ^a   Du, Wen Xi ^a   Chen, Shi Hui ^a  

^a CHANGCHUN INSTITUTE OF OPTICS   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c DALIAN MARITIME UNIVERSITY   (China)

Author keywords

Autofocusing; Feedback control; Laser direct writing; Line width; Spherical surface

Indexed keywords

EID: 33646725493     PISSN: 1003501X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)