ToF-SIMS analysis of organic impurities in UPW

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 305-308

  Kobayashi, Junji ^a,b   Owari, Masanori ^c  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

Adsorption; Amine; Organic impurities; ToF SIMS; UPW; Wafer; Wet cleaning

Indexed keywords

ADSORPTION; AMINES; HYDROPHILICITY; IMPURITIES; MASS SPECTROMETRY; SILICON WAFERS;

ORGANIC IMPURITIES; TOF-SIMS; UPW; WET CLEANING;

ORGANIC COMPOUNDS;

EID: 33646590973     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2204     Document Type: Conference Paper

References (4)

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