Sequential nano-patterning using electron and laser beams: A numerical methodology

Journal of Computational and Theoretical Nanoscience

Volumn 3, Issue 2, 2006, Pages 219-230

  Wong, Basil T ^a   Mengüç, M Pinar ^a,c   Vallance, R Ryan ^b  

^a UNIVERSITY OF KENTUCKY   (United States)

^b The George Washington University   (United States)

^c NONE   (United States)

Author keywords

Electron beam propagation; Material processing; Monte Carlo; Nano machining; Thermal conduction

Indexed keywords

COMPUTER SIMULATION; ELECTRON BEAMS; GOLD; GRAIN SIZE AND SHAPE; HEAT CONDUCTION; LASER BEAMS; LIGHT SCATTERING; MATHEMATICAL MODELS; MONTE CARLO METHODS; RAY TRACING; TEMPERATURE DISTRIBUTION; THIN FILMS;

ELECTRON-BEAM PROPAGATION; FOURIER LAW; FRESNEL-EXPRESSION; LASER PROPAGATION; NANO-MACHINING; NANO-PATTERNING; RADIATIVE TRANSFER;

NANOSTRUCTURED MATERIALS;

EID: 33646546984     PISSN: 15461955     EISSN: None     Source Type: Journal    
DOI: 10.1080/10807030500531497     Document Type: Article

References (15)

1. R. R. Vallance, A. M. Rao, and M. P. Mengüç, Processes for Nanomachining Using Carbon Nanotubes, U. S. Patent No. 6,660,959, University of Kentucky Research Foundation, Lexington, KY (2003).
2. B. T. Wong and M. R Mengüç, J. Quantitative Spectroscopy and Radiative Transfer 84, 437 (2004).
3. B. T. Wong, Ph.D. Dissertation, University of Kentucky, Lexington, KY (2005), in preparation.
4. B. T. Wong, M. P. Mengüç, and R. R. Vallance, J. Heat Transfer 126, 566 (2004).
5. D. C. Joy, Monte Carlo Modeling for Electron Microscopy and Microanalysis, Oxford University Press, New York (1995).
6. B. T. Wong and M. P. Mengüç, Numerical Heat Transfer, Part B 42, 119 (2002).
7. S. L. Jacques and L. Wang, Monte Carlo Modeling of Light Transport in Tissues, in Optical-Thermal Response of Laser-Irradiated Tissue, edited by A. J. Welch and M. J. C. Van Gemert, Plenum Press, New York (1995), pp. 73-100.
8. E. Hecht, Optics, Addison Wesley, New York (1998).
9. F. M. Modest, Radiative Heat Transfer, McGraw-Hill, New York (1993).
10. E. D. Palik, Handbook of Optical Constants of Solids, Academic Press, New York (1985).
11. B. T. Wong and M. P. Mengüç, ASME Summer Heat Transfer Conference, Las Vegas, Nevada (2003).
12. F. P. Incropera and D. P. DeWitt, Fundamentals of Heat and Mass Transfer, John Wiley and Sons, New York (1996).
13. J. H. Matthews and K. D. Fink, Numerical Methods Using Matlab, Prentice Hall, New Jersey (1999).
14. D. Y Tzou, Macro- to Microscale Heat Transfer, Taylor and Francis, Washington, DC (1997).
15. J. Hohlfeld, S.-S. Wellershoff, J. Güdde, U. Conrad, V. Jähnke, and E. Matthias, Chem. Phys. 251, 237 (2000).