Influence of annealing temperature on the structure and photoluminescence properties of SiC films

Weixi Jiagong Jishu/Microfabrication Technology

Volumn , Issue 1, 2006, Pages 23-26

  Sha, Zhen Dong ^a   Wu, Xue Mei ^a   Zhuge, Lan Jian ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

Annealing temperature; Film; Magnetron sputtering; Photoluminescence(PL) properties; SiC

Indexed keywords

EID: 33646536063     PISSN: 10038213     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)