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Volumn 352, Issue 6-7 SPEC. ISS., 2006, Pages 664-668

Waveguide writing by CO2 laser annealing on sputtered silica film

Author keywords

FTIR measurements; Planar waveguides; Silica; Sputtering

Indexed keywords

ANNEALING; CARBON DIOXIDE; REFRACTIVE INDEX; SILICA; SPUTTER DEPOSITION; WAVEGUIDES;

CLADDING STRUCTURE; LASER ANNEALING; SILICA FILMS; SILICA SUBSTRATES;

THIN FILMS;

EID: 33646432216 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/j.jnoncrysol.2005.11.050 Document Type: Article

Times cited : (7)

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